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Title

Direct chemical in-depth profile analysis and thickness quantification of nanometer multilayers using pulsed-rf-GD-TOFMS

AuthorsMartín, José Ignacio ; Quirós, Carlos
KeywordsGlow discharge
Mass spectrometry
Depth profile analysis
Nanometer layers
Useful yield
Issue Date2010
PublisherSpringer
CitationAnalytical and Bioanalytical Chemistry 396(8): 2881-2887 (2010)
AbstractNanometer depth resolution is investigated using an innovative pulsed-radiofrequency glow discharge time-of-flight mass spectrometer (pulsed-rf-GD-TOFMS). A series of ultra-thin (in nanometers approximately) Al/Nb bilayers, deposited on Si wafers by dc-magnetron sputtering, is analyzed. An Al layer is first deposited on the Si substrate with controlled and different values of the layer thickness, t Al. Samples with t Al = 50, 20, 5, 2, and 1 nm have been prepared. Then, a Nb layer is deposited on top of the Al one, with a thickness t Nb = 50 nm that is kept constant along the whole series. Qualitative depth profiles of those layered sandwich-type samples are determined using our pulsed-rf-GD-TOFMS set-up, which demonstrated to be able to detect and measure ultra-thin layers (even of 1 nm). Moreover, Gaussian fitting of the internal Al layer depth profile is used here to obtain a calibration curve, allowing thickness estimation of such nanometer layers. In addition, the useful yield (estimation of the number of detected ions per sputtered atom) of the employed pulsed-rf-GD-TOFMS system is evaluated for Al at the selected operating conditions, which are optimized for the in-depth profile analysis with high depth resolution.
Description7 páginas, 3 figuras, 2 tablas.-- et al.
Publisher version (URL)http://dx.doi.org/10.1007/s00216-009-3382-8
URIhttp://hdl.handle.net/10261/43871
DOI10.1007/s00216-009-3382-8
ISSN1618-2642
E-ISSN1618-2650
Appears in Collections:(CINN) Artículos
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