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Título

Simultaneous imaging of the topography and dynamic properties of nanomechanical systems by optical beam deflection microscopy

AutorKosaka, Priscila M. CSIC ORCID ; Tamayo de Miguel, Francisco Javier CSIC ORCID; Gil-Santos, Eduardo CSIC ORCID; Mertens, Johann CSIC ORCID; Pini, Valerio CSIC ORCID; Martínez Cuadrado, Nicolás Francisco CSIC
Palabras claveCantilevers
Image resolution
Internal stresses
Laser beams
Micromechanical devices
Optical images
Fecha de publicación24-mar-2011
EditorAmerican Institute of Physics
CitaciónJournal of Applied Physics 109(6): 064315 (2011)
ResumenWe present an optical microscopy technique based on the scanning of a laser beam across the surface of a sample and the measurement of the deflection of the reflected laser beam in two dimensions. The technique is intended for characterization of nanomechanical systems. It provides the height of a nanomechanical system with sub-nanometer vertical resolution. In addition, it simultaneously provides a complete map of the resonant properties. We demonstrate the capability of the technique by analyzing the residual stress and vibration mode shape of a system consisting of two elastically coupled nanocantilevers. The technique is simple, allows imaging in air, vacuum and liquids, and it is unique in providing synchronized information of the static and dynamic out-of-plane displacement of nanomechanical systems.
Descripción5 figuras, 5 páginas
Versión del editorhttp://dx.doi.org/10.1063/1.3561812
URIhttp://hdl.handle.net/10261/39099
DOI10.1063/1.3561812
ISSN0021-8979
Aparece en las colecciones: (IMN-CNM) Artículos

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