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Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/35675
Title: SU-8 cantilever sensor system with integrated readout
Authors: Johansson, A.; Calleja, Montserrat ; Rasmussen, P. A.; Boisen, Anja
Keywords: Cantilever
Piezoresistive readout
Issue Date: 23-Sep-2005
Publisher: Elsevier
Citation: Sensors and Actuators A: Physical 123-124:111-115 (2005)
Abstract: We have developed a cantilever sensor array with integrated piezoresistive readout. The cantilevers are placed in a micro channel and the chip is fabricated in the epoxy-based photoresist SU-8. Surface stress changes on the cantilever due to molecular adsorption are detected by encapsulated Au piezoresistors. High sensitivity can be obtained due to the low Young's modulus of SU-8 and the piezoresistive readout will make the sensor compact to enable a portable device. This article describes the fabrication and characterisation of the cantilever sensor as well as some preliminary measurements using alkanethiols.
Publisher version (URL): http://dx.doi.org/10.1016/j.sna.2005.03.025
URI: http://hdl.handle.net/10261/35675
DOI: 10.1016/j.sna.2005.03.025
ISSN: 0924-4247
Appears in Collections:(IMM-CNM) Artículos
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