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|Title:||SU-8 cantilever sensor system with integrated readout|
|Authors:||Johansson, A.; Calleja, Montserrat; Rasmussen, P. A.; Boisen, Anja|
|Citation:||Sensors and Actuators A: Physical 123-124:111-115 (2005)|
|Abstract:||We have developed a cantilever sensor array with integrated piezoresistive readout. The cantilevers are placed in a micro channel and the chip is fabricated in the epoxy-based photoresist SU-8. Surface stress changes on the cantilever due to molecular adsorption are detected by encapsulated Au piezoresistors. High sensitivity can be obtained due to the low Young's modulus of SU-8 and the piezoresistive readout will make the sensor compact to enable a portable device. This article describes the fabrication and characterisation of the cantilever sensor as well as some preliminary measurements using alkanethiols.|
|Publisher version (URL):||http://dx.doi.org/10.1016/j.sna.2005.03.025|
|Appears in Collections:||(IMM-CNM) Artículos|
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