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Título : SU-8 cantilever sensor system with integrated readout
Autor : Johansson, A., Calleja, Montserrat, Rasmussen, P. A., Boisen, Anja
Palabras clave : Cantilever
Piezoresistive readout
Fecha de publicación : 23-Sep-2005
Editor: Elsevier
Resumen: We have developed a cantilever sensor array with integrated piezoresistive readout. The cantilevers are placed in a micro channel and the chip is fabricated in the epoxy-based photoresist SU-8. Surface stress changes on the cantilever due to molecular adsorption are detected by encapsulated Au piezoresistors. High sensitivity can be obtained due to the low Young's modulus of SU-8 and the piezoresistive readout will make the sensor compact to enable a portable device. This article describes the fabrication and characterisation of the cantilever sensor as well as some preliminary measurements using alkanethiols.
Versión del editor:
ISSN: 0924-4247
DOI: 10.1016/j.sna.2005.03.025
Citación : Sensors and Actuators A: Physical 123-124:111-115 (2005)
Appears in Collections:(IMM-CNM) Artículos

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