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Closed Access item A Study of the Defect Structure in GaAS1−xPx/GaAs AS x<0.25

Authors:Aragón, G.
Castro, M. J. de
Molina, Sergio I.
González, Yolanda
González, Luisa
Briones Fernández-Pola, Fernando
García, Rafael
Issue Date:1993
Publisher:Materials Research Society
Citation:MRS Proceedings 317: 315-320 (1993)
Abstract:The defect structure of GaAsP layer grown by Atomic Layer Molecular Beam Epitaxy on (001) GaAs substrate has been studied by Transmission Electron Microscopy. The phosphorous content and the epilayer thickness have been changed below 25% and 1μm respectively. Three kinds of defect structure have been found: a) α-δ fringes at the interface for coherent epilayer, b) Misfit dislocation for thin epilayers and c) Multiple cracks normal to the interface and parallel to one <110> direction for thick epilayers.
Description:6 páginas.-- Comunicación presentada al 1993 MRS Fall Meeting, Symposium B – Mechanisms of Thin Film Evolution.
Publisher version (URL):http://dx.doi.org/10.1557/PROC-317-315
Appears in Collections:(IMM-CNM) Artículos

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