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Title: AFM and TEM study of the lateral composition modulation in etched and photo etched InxGa1−xP epitaxial layers
Authors: Eremenko, V., González Sotos, Luisa, González Díez, Yolanda, Vdovin, V., Vázquez, Luis, Aragón, G., Herrera, Miriam, Briones Fernández-Pola, Fernando
Keywords: Surface morphology
Transmission electron microscopy
Atomic force microscopy
Issue Date: 30-Apr-2002
Publisher: Elsevier
Abstract: An alternative way to characterise composition modulation in InxGa1−xP ALMBE layers grown on GaAs (001) substrate at a temperature of 420 °C by selective etching and photo etching is presented for the first time. AFM and TEM examinations revealed characteristic quasi-periodic surface structures consisting of ridges oriented along [110]. We propose that morphology features observed in the experiments are related to composition modulation effects.
Description: 5 páginas, 4 figuras.-- Póster presentado al DRIP-IX : 9ª International Conference on Defects- Recognition, Imaging and Physics in Semiconductors celebrada en Rimini (Italia) del 24 al 28 de Septiembre de 2001.
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ISSN: 0921-5107
???metadata.dc.identifier.doi???: 10.1016/S0921-5107(01)01016-9
Citation: Materials Science and Engineering B 91-92: 269-273 (2002)
Appears in Collections:(ICMM) Artículos
(IMM-CNM) Artículos

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