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Título: | Polymeric mechanical sensors with strain gauge readout in a microfluidic system |
Autor: | Calleja, Montserrat CSIC ORCID ; Rasmussen, P. A.; Johansson, A.; Boisen, Anja | Palabras clave: | Biosensors Microfluidics Piezoresistive read-out Polymer cantilevers |
Fecha de publicación: | oct-2003 | Resumen: | Micrometer sized cantilevers can be used as highly sensitive bioichemical sensors and are usually fabricated in silicon. In this work, we have realized for the first time a bio/chemical sensor platform consisting of an array of four SU-8 cantilevers integrated into a microfluidic system, also fabricated in the polymer SU-8. The cantilevers have built-in strain gauges, which provides a simple electrical read-out of surface stress changes. Two of the cantilevers are used as reference cantilevers, whereas the other two cantilevers will be used for specific molecular recognition. The cantilevers are connected forming two Wheatstone bridges. With this set-up, common-mode rejection of noise from the surroundings is obtained, reducing the noise and the drift considerably. The cantilever device is fabricated as two separate parts, which are subsequently bonded together using SU-8 as glue. The measured noise level indicates that the device is suitable for molecular recognition measurements. | Descripción: | Comunicación presentada en el 7th lnternational Conference on Miniaturized Chemical and Blochemlcal Analysts Systems October 5-9, 2003, Squaw Valley, Callfornla USA | Versión del editor: | http://www.rsc.org/binaries/LOC/2003/Volume1/052-207.pdf | URI: | http://hdl.handle.net/10261/29956 |
Aparece en las colecciones: | (IMN-CNM) Comunicaciones congresos |
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