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Título : T-shaped microcantilever sensor with reduced deflection offset
Autor : Plaza, José Antonio, Zinoviev, Kirill, Villanueva, G., Álvarez, Mar, Tamayo de Miguel, Francisco Javier, Domínguez, Carlos, Lechuga, Laura M.
Fecha de publicación : 31-Aug-2006
Editor: American Institute of Physics
Resumen: The authors have designed and fabricated arrays of microcantilevers with a geometry that shows reduced initial angular offset and angle deviation between the cantilevers of the array. This feature allows to detect the displacement of the cantilevers using the optical beam deflection technique and a single split photodetector. The structure is analytically and numerically simulated to demonstrate its feasibility. In addition, experimental measurements of the angle offset corroborate the offset and the angle deviation reduction. Finally, they illustrate the potential of these micromechanical structures as sensors by measuring a monolayer of single stranded DNA.
Descripción : 3 páginas, 2 figuras, 1 tabla.
Versión del editor:
ISSN: 0003-6951
DOI: 10.1063/1.2345234
Citación : Applied Physics Letters 89(9): 094109 (2006)
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