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Open Access item T-shaped microcantilever sensor with reduced deflection offset

Authors:Plaza, José Antonio
Zinoviev, Kirill
Villanueva, G.
Álvarez, Mar
Tamayo, Javier
Domínguez, Carlos
Lechuga, Laura M.
Issue Date:31-Aug-2006
Publisher:American Institute of Physics
Citation:Applied Physics Letters 89(9): 094109 (2006)
Abstract:The authors have designed and fabricated arrays of microcantilevers with a geometry that shows reduced initial angular offset and angle deviation between the cantilevers of the array. This feature allows to detect the displacement of the cantilevers using the optical beam deflection technique and a single split photodetector. The structure is analytically and numerically simulated to demonstrate its feasibility. In addition, experimental measurements of the angle offset corroborate the offset and the angle deviation reduction. Finally, they illustrate the potential of these micromechanical structures as sensors by measuring a monolayer of single stranded DNA.
Description:3 páginas, 2 figuras, 1 tabla.
Publisher version (URL):http://dx.doi.org/10.1063/1.2345234
URI:http://hdl.handle.net/10261/27968
ISSN:0003-6951
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Appears in Collections:(IMM-CNM) Artículos
(IMB-CNM) Artículos

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