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Open Access item Integrated optical silicon IC compatible nanodevices for biosensing applications

Authors:Lechuga, Laura M.
Sepúlveda Martínez, Borja
Llobera, Andreu
Calle Martín, Ana
Domínguez, Carlos
Keywords:Biosensor, Integrated optics, Mach-Zehnder interferometer, Silicon microtechnology, Optical waveguides
Issue Date:28-Jul-2003
Publisher:Society of Photo-Optical Instrumentation Engineers
Citation:Proceedings of SPIE 5119: 140-148 (2003)
Abstract:We present a nanobiosensor device based on evanescent wave detection by using optical waveguides in a highly sensitive interferometric configuration. The device is fabricated by standard CMOS microelectronics technology after a precise design of the device structure in order to achieve a high surface sensitivity for biosensing applications. Direct immunosensing with the sensor has been tested after a covalent bonding of the receptor layer to the surface device. A flow delivery system, optical bench for testing, data acquisition and processing of the signal have been also implemented.
Description:9 páginas, 8 figuras,1 tabla.-- Trabajo presentado en la conferencia "Bioengineered and Bioinspired Systems"; Maspalomas, Gran Canaria (España); 19-Mayo-2003; Editores: Angel Rodriguez-Vazquez, Derek Abbott, Ricardo Carmona.
Publisher version (URL):http://dx.doi.org/10.1117/12.497470
Appears in Collections:(IMM-CNM) Artículos
(IMB-CNM) Artículos

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