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Open Access item Optimized silicon antiresonant reflecting optical waveguides for sensing applications

Authors:Prieto, Francisco
Lechuga, Laura M.
Calle Martín, Ana
Llobera, Andreu
Domínguez, Carlos
Keywords:ARROW, Mach–Zehnder interferometer (MZI)
Issue Date:7-Aug-2002
Publisher:Institute of Electrical and Electronics Engineers
Citation:Journal of Lightwave Technology 19(1): 75-83 (2002)
Abstract:The development of an evanescent field sensor with an integrated Mach-Zehnder interferometric (MZI) configuration requires the fabrication of optical waveguides with two main characteristics: (1) monomode behavior and (2) high surface sensitivity for sensing biomolecular interactions in a direct way (without labels). In this paper, we present an experimental study for the optimization of the different parameters of the waveguides that will be the basis of a highly sensitive optical sensor. After optimization, an MZI sensor has been fabricated and some sensing applications are shown. The designed waveguides are based on antiresonant reflecting optical waveguide (ARROW) structures and are fabricated with standard silicon technology.
Description:9 páginas, 16 figuras.
Publisher version (URL):http://dx.doi.org/10.1109/50.914488
URI:http://hdl.handle.net/10261/27862
ISSN:0733-8724
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Appears in Collections:(IMB-CNM) Artículos
(IMM-CNM) Artículos

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