Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/27453
Share/Export:
logo share SHARE BASE
Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE
Title

Phosphorous effusion apparatus and method for Molecular Beam Epitaxy

AuthorsBriones Fernández-Pola, Fernando
KeywordsPhosphorus effusion cell
Molecular beam epitaxy
Issue Date27-Jul-1994
CitationGB 2274468 (A)
AbstractA phosphorus effusion cell for molecular beam epitaxy consists of a vessel in which, by sublimation of red phosphorus, the vapour of this element is produced, the vessel being closed by means of a vacuum-tight valve (3) which regulates its flow. In the vessel, there are two zones having different temperatures, one for (1) of red phosphorus and another (2) for condensation and re-evaporation of white phosphorus, both zones being thermally insulated by means of reflecting screens (6) which prevent the temperature of the heating resistance from having to reach temperatures above 350 DEG C. The valve, intermittent closing of which regulates the effusion of phosphorus vapour, is at a temperature slightly above that of the thermostated zone of condensation/reevaporation of white phosphorus. It finds application in the manufacture of semiconducting structures.
DescriptionTitular: Consejo Superior de Investigaciones Científicas (CSIC).--Riber S.A. .-- Fecha de publicación : 1994-07-27
URIhttp://hdl.handle.net/10261/27453
Appears in Collections:(IMN-CNM) Patentes




Files in This Item:
File Description SizeFormat
GB2274468A.pdf1,04 MBAdobe PDFThumbnail
View/Open
Show full item record
Review this work

Page view(s)

251
checked on May 25, 2022

Download(s)

87
checked on May 25, 2022

Google ScholarTM

Check


WARNING: Items in Digital.CSIC are protected by copyright, with all rights reserved, unless otherwise indicated.