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dc.contributor.author | González-Arrabal, Raquel | - |
dc.contributor.author | Gordillo, Nuria | - |
dc.contributor.author | Martín-González, Marisol | - |
dc.contributor.author | Ruiz-Bustos, R. | - |
dc.contributor.author | Agulló-López, F. | - |
dc.date.accessioned | 2010-07-07T08:02:39Z | - |
dc.date.available | 2010-07-07T08:02:39Z | - |
dc.date.issued | 2010-05-20 | - |
dc.identifier.citation | Journal of Applied Physics 107, 103513 (2010) | en_US |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | http://hdl.handle.net/10261/26047 | - |
dc.description.abstract | The atomic composition, structural, morphological, and optical properties of N-rich copper nitride thin films have been investigated prior to and after annealing them in vacuum at temperatures up to 300 °C. Films were characterized by means of ion-beam analysis (IBMA), X-ray diffraction (XRD), atomic force microscopy (AFM), and spectroscopic ellipsometry techniques (SE). The data reveal that even when the total (integrated over the whole thickness) atomic composition of the films remains constant, nitrogen starts to migrate from the bulk to the film surface, without out-diffusing, at temperatures as low as 100 °C. This migration leads to two chemical phases with different atomic concentration of nitrogen, lattice parameters, and crystallographic orientation but with the same crystal structure. XRD experimental and Rietveld refined data seem to confirm that nitrogen excess accommodates in interstitial locations within the anti-ReO3 crystal lattice forming a solid solution. The influence of nitrogen migration on the optical (electronic) properties of the films will be discussed. | en_US |
dc.description.sponsorship | The authors want to thank to Dr. Rainer Groetzschel, Dr. D. Güttler for some NRA measurements, and to Dr. F. Agulló-Rueda for the Raman measurements and for the very helpful discussions. R.G.A and N.G. acknowledge to the M.E.C and C.S.I.C., Juan de la Cierva, and M.C.Y.T. Grant No. FIS 2008-01431 for the financial support. The NRA measurements were supported by the EU-“Research Infrastructures Transnational Access” program AIM “Center for Application of Ion Beams in Materials Research” under EC Contract No. 025646. | en_US |
dc.format.extent | 585870 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language.iso | eng | en_US |
dc.publisher | American Institute of Physics | en_US |
dc.rights | openAccess | en_US |
dc.subject | Annealing | en_US |
dc.subject | Atomic force microscopy | en_US |
dc.subject | Copper compounds | en_US |
dc.subject | Crystal structures | en_US |
dc.subject | Ion beam effects | en_US |
dc.subject | Optical properties | en_US |
dc.subject | Solid solutions | en_US |
dc.subject | Thermal stability | en_US |
dc.subject | X-ray diffraction | en_US |
dc.title | Thermal stability of copper nitride thin films: The role of nitrogen migration | en_US |
dc.type | artículo | en_US |
dc.identifier.doi | 10.1063/1.3369450 | - |
dc.description.peerreviewed | Peer reviewed | en_US |
dc.relation.publisherversion | http://dx.doi.org/10.1063/1.3369450 | en_US |
dc.type.coar | http://purl.org/coar/resource_type/c_6501 | es_ES |
item.fulltext | With Fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.cerifentitytype | Publications | - |
item.openairetype | artículo | - |
item.grantfulltext | open | - |
item.languageiso639-1 | en | - |
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González Arrabal, R. et al J. Appl. Phys._107_2010.pdf | 572,14 kB | Adobe PDF | Visualizar/Abrir |
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