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Open Access item Highly sensitive polymer-based cantilever-sensors for DNA detection

Authors:Calleja, Montserrat
Nordström, M.
Álvarez, Mar
Tamayo, Javier
Lechuga, Laura M.
Boisen, Anja
Keywords:Biosensors, Micromechanical sensors, DNA, Polymer cantilevers
Issue Date:13-Jul-2005
Citation:Ultramicroscopy 105(1-4): 215-222 (2005)
Abstract:We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor micro-system. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young’s modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers.
Description:8 páginas, 5 figuras, 1 tabla.-- PACS: 87.80.−y; 87.17.Gg; 07.10.Cm; 87.83.+a
Publisher version (URL):http://dx.doi.org/10.1016/j.ultramic.2005.06.039
Appears in Collections:(IMM-CNM) Artículos

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