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Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/23660
Title: Silicon microcantilevers with MOSFET detection
Authors: Tosolini, Giordano; Villanueva, G.; Pérez Murano, Francesc; Bausells, Joan
Keywords: Microcantilever
Issue Date: 26-Nov-2009
Publisher: Elsevier
Citation: Microelectronic Engineering 87 (2010) 1245–1247
Abstract: We report the fabrication of silicon microcantilevers with MOSFET detection, to be used in force measurements for biomolecular detection. Thin cantilevers are required for a high force sensitivity. Therefore the source and drain of the transistors have been fabricated by As implantation to obtain shallow PN junctions. The cantilevers have been oriented on the non-standard (100) crystallographic direction of silicon, to maximize the stress response of the NMOS transistors. The force sensitivity and resolution of the cantilevers have been tested by applying a force with an AFM tip. Values of 25 μV/pN and 56 pN respectively have been obtained for a force applied at the tip of a cantilever with a length of 200 μm, a width of 24 μm and a silicon thickness of 340 nm.
Publisher version (URL): http://dx.doi.org/10.1016/j.mee.2009.11.125
URI: http://hdl.handle.net/10261/23660
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.11.125
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