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Open Access item Silicon microcantilevers with MOSFET detection

Authors:Tosolini, Giordano
Villanueva, G.
Pérez Murano, Francesc
Bausells, Joan
Keywords:Microcantilever, MOSFET, Piezoresistance, Biosensor
Issue Date:26-Nov-2009
Citation:Microelectronic Engineering 87 (2010) 1245–1247
Abstract:We report the fabrication of silicon microcantilevers with MOSFET detection, to be used in force measurements for biomolecular detection. Thin cantilevers are required for a high force sensitivity. Therefore the source and drain of the transistors have been fabricated by As implantation to obtain shallow PN junctions. The cantilevers have been oriented on the non-standard (100) crystallographic direction of silicon, to maximize the stress response of the NMOS transistors. The force sensitivity and resolution of the cantilevers have been tested by applying a force with an AFM tip. Values of 25 μV/pN and 56 pN respectively have been obtained for a force applied at the tip of a cantilever with a length of 200 μm, a width of 24 μm and a silicon thickness of 340 nm.
Publisher version (URL):http://dx.doi.org/10.1016/j.mee.2009.11.125
Appears in Collections:(IMB-CNM) Artículos

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