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Effect of deposition temperature on surface acoustic wave velocity of aluminum nitride films determined by Brillouin spectroscopy

AuthorsAssouar, M. B.; Jiménez Riobóo, R. J. ; Vila, M.; Alnot, P.
KeywordsAluminium compounds
III-V semiconductors
Wide band gap semiconductors
Brillouin spectra
Surface acoustic waves
Issue Date3-Nov-2005
PublisherAmerican Institute of Physics
CitationJournal of Applied Physics 98(9): 096102 (2005)
AbstractBrillouin spectroscopy has been used to study the effect of the deposition temperature on the surface acoustic wave (SAW) propagation velocity of aluminum nitride (AlN) films. The results show a dependence of the SAW propagation velocity on the growth temperature of AlN films. The highest value of acoustic velocity was obtained for the film elaborated without heating. Structural characterization of the AlN films synthesized at various deposition temperatures was carried out by x-ray diffraction. These analyses pointed out that the deposition temperature influences the standard deviation of (002) AlN film preferred orientation. The growth temperature clearly influences the acoustical and crystalline properties of AlN thin films.
Description3 pages, 4 figures.-- PACS: 78.35.+c; 68.35.Iv; 78.66.Fd
Publisher version (URL)http://dx.doi.org/10.1063/1.2121927
Appears in Collections:(ICMM) Artículos
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