Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/21736
Share/Impact:
Título : Effect of deposition temperature on surface acoustic wave velocity of aluminum nitride films determined by Brillouin spectroscopy
Autor : Assouar, M. B., Jiménez Riobóo, R. J., Vila, M., Alnot, P.
Palabras clave : Aluminium compounds
III-V semiconductors
Wide band gap semiconductors
Brillouin spectra
Surface acoustic waves
Fecha de publicación : 3-Nov-2005
Editor: American Institute of Physics
Citación : Journal of Applied Physics 98(9): 096102 (2005)
Resumen: Brillouin spectroscopy has been used to study the effect of the deposition temperature on the surface acoustic wave (SAW) propagation velocity of aluminum nitride (AlN) films. The results show a dependence of the SAW propagation velocity on the growth temperature of AlN films. The highest value of acoustic velocity was obtained for the film elaborated without heating. Structural characterization of the AlN films synthesized at various deposition temperatures was carried out by x-ray diffraction. These analyses pointed out that the deposition temperature influences the standard deviation of (002) AlN film preferred orientation. The growth temperature clearly influences the acoustical and crystalline properties of AlN thin films.
Descripción : 3 pages, 4 figures.-- PACS: 78.35.+c; 68.35.Iv; 78.66.Fd
Versión del editor: http://dx.doi.org/10.1063/1.2121927
URI : http://hdl.handle.net/10261/21736
ISSN: 0021-8979
DOI: 10.1063/1.2121927
Citación : Journal of Applied Physics 98(9): 096102 (2005)
Appears in Collections:(ICMM) Artículos

Files in This Item:
File Description SizeFormat 
GetPDFServlet.pdf256,85 kBAdobe PDFView/Open
Show full item record
 
CSIC SFX LinksSFX Query


Items in Digital.CSIC are protected by copyright, with all rights reserved, unless otherwise indicated.