Substrate/layer interface of amorphous-carbon hard coatings

Abstract

A combined study of the crystalline structure, the chemical interaction, and diffusion processes of the substrate/layer interface of amorphous-carbon hard coatings is presented. The structure of the coatings and their gradient layer interface to a chromium buffer layer has been investigated on two substrates [Si(100) and tool steel] using x-ray diffraction (XRD). Chemical interaction and diffusion processes at the interfaces and within the layers were analyzed by Auger electron spectroscopy and x-ray photoemission spectroscopy depth profiles. The chromium buffer layer revealed similar textured structure on both substrates. The subsequent gradient layer was determined (within XRD limits) to be amorphous and composed of an amorphous-carbon and chromium-carbide composite. The chromium carbide maintains the same stoichiometry (Cr3C2), regardless of the gradually changing chromium content. No large-scale interdiffusion was measured, either between or within the layers.