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Nonoxidized Al-overcoated Ir bilayers with high reflectance in the extreme ultraviolet above 50 nm

AuthorsLarruquert, Juan Ignacio ; Méndez, José Antonio ; Aznárez, José Antonio
KeywordsExtreme ultraviolet
Far ultraviolet
Space optics
Thin films
Optical properties
Issue Date22-May-2002
PublisherThe International Society for Optics and Photonics
CitationOptical Engineering - Bellingham 41(6): 1418 (2002)
AbstractBilayers of a thin, nonoxidized Al film over an Ir film are prepared. The bilayers are intended to enhance the reflectance of Al below the Al plasma wavelength ((landa)p~83 nm). Above (landap) the bilayers have a high reflectance comparable to that of single Al films. Ir films were deposited by electron gun evaporation on a heated substrate. Al films of various thicknesses are deposited by evaporation from a thermal source on the Ir film once it is cooled to room temperature. The bilayers are prepared under ultra-high-vacuum (UHV) conditions and their reflectance is measured in situ. Accelerated aging processes, which are performed by annealing the bilayers in UHV, show that the bilayers are stable after 1 h annealing at temperatures up to 540±25 K. The bilayers show no observable deterioration after long-term storage under normal atmosphere. The optical constants of Ir films are also obtained. In-orbit coating of optical surfaces with Ir/Al bilayers is proposed for extreme UV astronomy.
Description7 pages, 6 figures.-- PACS: 42.79.Wc; 78.66.Bz; 78.20.Ci; 95.55.-n; 81.15.Ef; 81.40.Gh; 81.40.Tv; 78.40.Kc
Publisher version (URL)http://dx.doi.org/10.1117/1.1477438
Appears in Collections:(IFA) Artículos
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