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http://hdl.handle.net/10261/21050
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Campo DC | Valor | Lengua/Idioma |
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dc.contributor.author | Sendra, José Ramón | - |
dc.contributor.author | Anguita, José Virgilio | - |
dc.contributor.author | Pérez Camacho, J. J. | - |
dc.contributor.author | Briones Fernández-Pola, Fernando | - |
dc.date.accessioned | 2010-02-15T10:09:21Z | - |
dc.date.available | 2010-02-15T10:09:21Z | - |
dc.date.issued | 1995-11-27 | - |
dc.identifier.citation | Applied Physics Letters 67(22): 3289 (1995) | en_US |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10261/21050 | - |
dc.description | 3 pages, 6 figures. | en_US |
dc.description.abstract | Reactive ion beam etching of aluminum indium antimonide, gallium indium antimonide heterostructures in electron cyclotron resonance plasma using methane/hydrogen/nitrogen/silicon tetrachloride (CH4/H2/N2/SiCl4) mixtures has been performed at room temperature. Due to the ratio of chlorine to methane, formation of an indium chloride layer on the etched surface is avoided, thus resulting, in etched surfaces as smooth as the original ones and flat mesa sidewalls. Infrared diodes (2.3µm) have been fabricated using this etching technology. | en_US |
dc.description.sponsorship | The work was performed within ESPRIT Contract No. 6374 (MMMGas). | en_US |
dc.format.extent | 214086 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language.iso | eng | en_US |
dc.publisher | American Institute of Physics | en_US |
dc.rights | openAccess | en_US |
dc.title | Reactive ion beam etching of aluminum indium antimonide, gallium indium antimonide heterostructures in electron cyclotron resonance methane/hydrogen/nitrogen/silicon tetrachloride discharges at room temperature | en_US |
dc.type | artículo | en_US |
dc.identifier.doi | 10.1063/1.115223 | - |
dc.description.peerreviewed | Peer reviewed | en_US |
dc.relation.publisherversion | http://dx.doi.org/10.1063/1.115223 | en_US |
dc.type.coar | http://purl.org/coar/resource_type/c_6501 | es_ES |
item.openairetype | artículo | - |
item.cerifentitytype | Publications | - |
item.languageiso639-1 | en | - |
item.grantfulltext | open | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.fulltext | With Fulltext | - |
Aparece en las colecciones: | (IMN-CNM) Artículos |
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GetPDFServlet.pdf | 209,07 kB | Adobe PDF | Visualizar/Abrir |
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