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A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films

AuthorsEl Beainou, R.; García-Valenzuela, A.; Raschetti, M.; Cote, J.M.; Alvarez, Rafael; Palmero, Alberto ; Potin, V.; Martin, N.
KeywordsOblique angle deposition
W thin films
Tilted columns
Fibrous morphology.
Issue Date2020
CitationMaterials Letters 264 (2020)
AbstractWe report on the morphological disparity of the columnar growth in W thin films sputter-deposited by oblique angle deposition. Oriented tungsten thin films (400 ± 50 nm thick) are prepared using a tilt angle α of 80° and a sputtering pressure of 0.25 Pa. Inclined columns (β = 38 ± 2°) are produced and the microstructure is observed by scanning electron microscopy. A 4-view imaging is performed in order to show inhomogeneous growing evolutions in the columns. Morphological features vs. viewing direction are also investigated from a growth simulation of these tilted W columns. Experimental and theoretical approaches are successfully compared and allow understanding how the direction of the W particle flux leads to dense or fibrous morphologies, as the column apexes are in front of the flux or in the shadowing zone.
Publisher version (URL)http://dx.doi.org/10.1016/j.matlet.2020.127381
Identifiersdoi: 10.1016/j.matlet.2020.127381
issn: 1873-4979
Appears in Collections:(ICMS) Artículos
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