Real-time profile of microcantilevers for sensing applications

Abstract

An optical readout technique has been developed for real-time monitoring of the profile of microcantilever arrays for sensing applications. The technique is based on the automated two-dimensional scanning of a laser beam by using voice-coil actuators. Cantilever profiles are obtained with subnanometer resolution and a processing speed of about ten cantilevers per second. The technique is applied for real-time monitoring of the adsorption of the alkylthiol mercaptohexanol in an aqueous environment by using an array of five microcantilevers. Molecular adsorption produces a cantilever strain that significantly differs from the Stoney's model. Main strain changes are strongly located near the cantilever clamping.