Por favor, use este identificador para citar o enlazar a este item:
http://hdl.handle.net/10261/180952
COMPARTIR / EXPORTAR:
SHARE CORE BASE | |
Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL | DATACITE | |
Título: | Advanced scanning probe lithography |
Autor: | García García, Ricardo CSIC ORCID; Knoll, Armin W.; Riedo, Elisa | Fecha de publicación: | 5-ago-2014 | Editor: | Springer Nature | Citación: | Nature Nanotechnology 9: 577-587 (2014) | Resumen: | The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning-probe-based patterning methods. Some of these methods have demonstrated a high degree of robustness and patterning capabilities that are unmatched by other lithographic techniques. However, the limited throughput of scanning probe lithography has prevented its exploitation in technological applications. Here, we review the fundamentals of scanning probe lithography and its use in materials science and nanotechnology. We focus on robust methods, such as those based on thermal effects, chemical reactions and voltage-induced processes, that demonstrate a potential for applications. | Versión del editor: | https://doi.org/10.1038/nnano.2014.157 | URI: | http://hdl.handle.net/10261/180952 | DOI: | 10.1038/nnano.2014.157 | ISSN: | 1748-3387 | E-ISSN: | 1748-3395 |
Aparece en las colecciones: | (ICMM) Artículos |
Ficheros en este ítem:
Fichero | Descripción | Tamaño | Formato | |
---|---|---|---|---|
Garcia_Advanced_scanning_NNANO2014.pdf | 800,52 kB | Adobe PDF | Visualizar/Abrir |
CORE Recommender
SCOPUSTM
Citations
524
checked on 12-abr-2024
WEB OF SCIENCETM
Citations
490
checked on 22-feb-2024
Page view(s)
261
checked on 18-abr-2024
Download(s)
884
checked on 18-abr-2024
Google ScholarTM
Check
Altmetric
Altmetric
NOTA: Los ítems de Digital.CSIC están protegidos por copyright, con todos los derechos reservados, a menos que se indique lo contrario.