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Amorphous-Crystalline Micro- and Nanostructures in Silicon Fabricated Using Ultrashort Laser Pulses

AuthorsFuentes-Edfuf, Yasser ; García-Lechuga, Mario ; Puerto, D. ; Florian, Camilo ; García-Leis, Adianez ; Sánchez-Cortés, Santiago ; Solís Céspedes, Javier ; Siegel, Jan
Issue Date15-May-2017
PublisherOptical Society of America
CitationConference on Lasers and Electro-Optics,paper JTu5A.70 (2017)
AbstractWe demonstrate an innovative way to fabricate different types of amorphous-crystalline surface structures in silicon using ultrashort laser pulses. Fluence-dependent solidification dynamics and interference of incident and scattered laser light are identified as underlying mechanisms.
DescriptionCLEO: Applications and Technology 2017 San Jose, California United States 14–19 May 2017
Publisher version (URL)https://doi.org/10.1364/CLEO_AT.2017.JTu5A.70
Identifiersdoi: 10.1364/CLEO_AT.2017.JTu5A.70
Appears in Collections:(CFMAC-IEM) Artículos
(CFMAC-IO) Artículos
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