English   español  
Please use this identifier to cite or link to this item: http://hdl.handle.net/10261/139896
Share/Impact:
Statistics
logo share SHARE   Add this article to your Mendeley library MendeleyBASE

Visualizar otros formatos: MARC | Dublin Core | RDF | ORE | MODS | METS | DIDL
Exportar a otros formatos:

Title

Interdigitated design of a thermoelectric microgenerator based on silicon nanowire arrays

AuthorsDonmez, I.; Salleras Freixes, Marc; Calaza, Carlos; Santos, José D.; Gadea, Gerard; Morata, Alex; Dávila Pineda, Diana; Tarancón, Albert; Fonseca, Luis
KeywordsEnergy harvesting
Thermoelectrics
Silicon nanowire
Issue Date21-May-2015
PublisherThe International Society for Optics and Photonics
CitationProceedings of SPIE 9517: 95172C (2015
AbstractSilicon nanowires thermoelectric properties are much better than those of silicon bulk. Taking advantage of silicon microfabrication techniques and compatibilizing the device fabrication with the CVD-VLS silicon nanowire growth, we present a thermoelectric microgenerator based on silicon nanowire arrays with interdigitated structures which enhance the power density compared to previous designs presented by the authors. The proposed design features a thermally isolated silicon platform on the silicon device layer of an SOI silicon wafer. This silicon platform has vertical walls exposing <111> planes where gold nanoparticles are deposited by galvanic displacement. These gold nanoparticles act as seeds for the silicon nanowires. The growth takes place in a CVD with silane precursor, and uses the Vapor-Solid-Liquid synthesis. Once the silicon nanowires are grown, they connect the silicon platform with the silicon bulk. The proposed thermoelectric generator is unileg, which means that only one type of semiconductor is used, and the second connection is made through a metal. In addition, to improve the thermal isolation of the silicon platform, multiple trenches of silicon nanowire arrays are used, up to a maximum of nine. After packaging the device with nanowires, we are able to measure the Seebeck voltage and the power obtained with different operation modes: harvesting mode, where the bottom device is heated up, and the silicon platform is cooled down by natural or forced convection, and test mode, where a heater integrated on the silicon platform is used to produce a thermal gradient.
DescriptionProceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95172C (2015).-- Event: SPIE Microtechnologies, 2015, Barcelona, Spain.
Publisher version (URL)https://doi.org/10.1117/12.2178782
URIhttp://hdl.handle.net/10261/139896
DOI10.1117/12.2178782
ISSN0277-786X
Appears in Collections:(IMB-CNM) Artículos
Files in This Item:
File Description SizeFormat 
Spie 95172C.pdf3,78 MBAdobe PDFThumbnail
View/Open
Show full item record
Review this work
 

Related articles:


WARNING: Items in Digital.CSIC are protected by copyright, with all rights reserved, unless otherwise indicated.