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Título

Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries

AutorLlobet, Jordi CSIC ORCID ; Sansa Perna, Marc; Lorenzoni, Matteo; Borrisé, Xavier CSIC ORCID; San Paulo, Álvaro CSIC ORCID; Perez Murano, Francesc X. CSIC ORCID
Fecha de publicación2015
EditorAmerican Institute of Physics
CitaciónApplied Physics Letters 107(7): 073104 (2015)
ResumenThe effect of geometrical asymmetries on the piezoresistive transduction in suspended double clamped beam nanomechanical resonators is investigated. Tapered silicon nano-beams, fabricated using a fast and flexible prototyping method, are employed to determine how the asymmetry affects the transduced piezoresistive signal for different mechanical resonant modes. This effect is attributed to the modulation of the strain in pre-strained double clamped beams, and it is confirmed by means of finite element simulations.
DescripciónUnder the terms of the Creative Commons Attribution (CC BY) license to their work.
Versión del editorhttp://dx.doi.org/10.1063/1.4928709
URIhttp://hdl.handle.net/10261/127218
DOI10.1063/1.4928709
Identificadoresissn: 0003-6951
e-issn: 1077-3118
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