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Título: | Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries |
Autor: | Llobet, Jordi CSIC ORCID ; Sansa Perna, Marc; Lorenzoni, Matteo; Borrisé, Xavier CSIC ORCID; San Paulo, Álvaro CSIC ORCID; Perez Murano, Francesc X. CSIC ORCID | Fecha de publicación: | 2015 | Editor: | American Institute of Physics | Citación: | Applied Physics Letters 107(7): 073104 (2015) | Resumen: | The effect of geometrical asymmetries on the piezoresistive transduction in suspended double clamped beam nanomechanical resonators is investigated. Tapered silicon nano-beams, fabricated using a fast and flexible prototyping method, are employed to determine how the asymmetry affects the transduced piezoresistive signal for different mechanical resonant modes. This effect is attributed to the modulation of the strain in pre-strained double clamped beams, and it is confirmed by means of finite element simulations. | Descripción: | Under the terms of the Creative Commons Attribution (CC BY) license to their work. | Versión del editor: | http://dx.doi.org/10.1063/1.4928709 | URI: | http://hdl.handle.net/10261/127218 | DOI: | 10.1063/1.4928709 | Identificadores: | issn: 0003-6951 e-issn: 1077-3118 |
Aparece en las colecciones: | (CIN2) Artículos (IMB-CNM) Artículos (IMN-CNM) Artículos |
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Tuning piezoresistive.pdf | 1,49 MB | Adobe PDF | Visualizar/Abrir |
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