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Procede de preparation d'une couche de quartz-alpha epitaxiee sur support solide, materiau obtenu et applications

Other TitlesProcess for preparing an epitaxial alpha-quartz layer on a solid substrate, material obtained and uses
AuthorsBoissière, Cèdric; Carretero Genevrier, Adrian CSIC ORCID; Gich, Martí CSIC ORCID; Grosso, David; Sánchez, Clément
Issue Date30-Jan-2014
CitationWO2014016506 A1
Abstract[FR] La présente invention est relative à un procédé de préparation de couches de quartz-α épitaxiées sur substrat solide, au matériau obtenu selon ce procédé, et à ses diverses applications, notamment dans le domaine de l'électronique
[EN] The present invention relates to a process for preparing epitaxial α-quartz layers on a solid substrate, to the material obtained according to this process, and to the various uses thereof, in particular in the electronics field
Appears in Collections:(ICMAB) Patentes

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