2024-03-28T14:07:42Zhttp://digital.csic.es/dspace-oai/requestoai:digital.csic.es:10261/1477002020-04-17T09:01:33Zcom_10261_31com_10261_3col_10261_284
Focused electron and ion beam induced deposition on flexible and transparent polycarbonate substrates
Peinado, Patricia
Sangiao, S.
Teresa, José María de
Gobierno de Aragón
European Commission
Ministerio de Economía y Competitividad (España)
Magnetic materials
Superconducting materials
Nanowires
Diffraction gratings
Nanolithography
Focused electron beam induced deposition
Flexible transparent electronics
ACS AuthorChoice - This is an open access article published under an ACS AuthorChoice License.
The successful application of focused electron (and ion) beam induced deposition techniques for the growth of nanowires on flexible and transparent polycarbonate films is reported here. After minimization of charging effects in the substrate, sub-100 nm-wide Pt, W, and Co nanowires have been grown and their electrical conduction is similar compared to the use of standard Si-based substrates. Experiments where the substrate is bent in a controlled way indicate that the electrical conduction is stable up to high bending angles, >50°, for low-resistivity Pt nanowires grown by the ion beam. On the other hand, the resistance of Pt nanowires grown by the electron beam changes significantly and reversibly with the bending angle. Aided by the substrate transparency, a diffraction grating in transmission mode has been built based on the growth of an array of Pt nanowires that shows sharp diffraction spots. The set of results supports the large potential of focused beam deposition as a high-resolution nanolithography technique on transparent and flexible substrates. The most promising applications are expected in flexible nano-optics and nanoplasmonics, flexible electronics, and nanosensing.
2017-03-31T10:29:07Z
2017-03-31T10:29:07Z
2015
2017-03-31T10:29:07Z
artículo
ACS Nano 9(6): 6139-6146 (2015)
http://hdl.handle.net/10261/147700
10.1021/acsnano.5b01383
http://dx.doi.org/10.13039/501100000780
http://dx.doi.org/10.13039/501100003329
http://dx.doi.org/10.13039/501100010067
eng
Publisher's version
https://doi.org/10.1021/acsnano.5b01383
Sí
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2014-51982-C2-1-R
http://pubs.acs.org/page/policy/authorchoice_termsofuse.html
openAccess
American Chemical Society