2024-03-28T20:37:45Zhttp://digital.csic.es/dspace-oai/requestoai:digital.csic.es:10261/1770972020-12-13T09:09:06Zcom_10261_115com_10261_3col_10261_368
2019-03-01T12:45:25Z
urn:hdl:10261/177097
Reversible and irreversible reactions of trimethylaluminum with common organic functional groups as a model for molecular layer deposition and vapor phase infiltration
Yang, Fan
Brede, Jens
Ablat, Hayrensa
Abadia, Mikel
Zhang, Lianbing
Rogero, Celia
Elliott, Simon D.
Knez, Mato
European Commission
Ministerio de Economía y Competitividad (España)
Science Foundation Ireland
Irish Research Council
Eusko Jaurlaritza
Organic-inorganic hybrid materials are of great demand not at least for their enormous application potential in flexible devices. Atomic or molecular layer deposition (ALD or MLD) and vapor phase infiltration (VPI) offer novel pathways for the fabrication of such hybrids, but a clear understanding of the chemistry between the vaporized precursors and functional molecules is still lacking. In this work, the interactions between trimethylaluminum (TMA) and the organic functional groups -OH, -NH2, and -NO2 in the respective substituted phenyls, as well as their stability upon exposure to air are investigated. The experimental evidence agrees with theoretically predicted reaction pathways, showing that TMA initially binds to Lewis basic atoms of the investigated functional groups. Depending on the reaction energy barriers, the interaction between TMA and the investigated functional groups may result in either stable chemical bonding or intermediates that decompose upon exposure to humidity. This investigation contributes to the understanding of ALD/MLD and VPI processes at a molecular level and will support a better process optimization.
2019-03-01T12:45:25Z
2019-03-01T12:45:25Z
2017
2019-03-01T12:45:26Z
artículo
Advanced Materials Interfaces 4(18): 1700237 (2017)
http://hdl.handle.net/10261/177097
10.1002/admi.201700237
http://dx.doi.org/10.13039/501100001602
http://dx.doi.org/10.13039/501100003329
http://dx.doi.org/10.13039/501100000780
http://dx.doi.org/10.13039/501100002081
http://dx.doi.org/10.13039/501100003086
eng
Sí
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2016-77393-R
info:eu-repo/grantAgreement/MINECO/Plan Estatal de Investigación Científica y Técnica y de Innovación 2013-2016/MAT2013-46593-C6-4-P
info:eu-repo/grantAgreement/EC/FP7/322158
closedAccess
Wiley-VCH