2024-03-29T11:50:53Zhttp://digital.csic.es/dspace-oai/requestoai:digital.csic.es:10261/1272182022-12-21T12:22:48Zcom_10261_10252com_10261_3com_10261_28com_10261_4com_10261_36col_10261_10253col_10261_281col_10261_289
2015-12-23T12:51:24Z
urn:hdl:10261/127218
Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries
Llobet, Jordi
Sansa Perna, Marc
Lorenzoni, Matteo
Borrisé, Xavier
San Paulo, Álvaro
Perez Murano, Francesc X.
Ministerio de Ciencia e Innovación (España)
European Commission
Under the terms of the Creative Commons Attribution (CC BY) license to their work.
The effect of geometrical asymmetries on the piezoresistive transduction in suspended double clamped beam nanomechanical resonators is investigated. Tapered silicon nano-beams, fabricated using a fast and flexible prototyping method, are employed to determine how the asymmetry affects the transduced piezoresistive signal for different mechanical resonant modes. This effect is attributed to the modulation of the strain in pre-strained double clamped beams, and it is confirmed by means of finite element simulations.
2015-12-23T12:51:24Z
2015-12-23T12:51:24Z
2015
2015-12-23T12:51:24Z
artículo
Applied Physics Letters 107(7): 073104 (2015)
http://hdl.handle.net/10261/127218
10.1063/1.4928709
http://dx.doi.org/10.13039/501100004837
http://dx.doi.org/10.13039/501100000780
eng
Publisher's version
http://dx.doi.org/10.1063/1.4928709
Sí
info:eu-repo/grantAgreement/EC/FP7/318804
http://creativecommons.org/licenses/by/4.0/
openAccess
American Institute of Physics