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Browsing by Author Monaghan, Scott

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Rights	Preview	Issue Date	Title	Author(s)	Type
openAccess		31-May-2011	Fabrication of HfO2 patterns by laser interference nanolithography and selective dry etching for III-V CMOS application	*Benedicto, Marcos ; Galiana, Beatriz ; Molina-Aldareguia, Jon; Monaghan, Scott; Hurley, Paul K.; Cherkaoui, Karim; Vázquez, Luis ; Tejedor, Paloma*	artículo

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