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Browsing by Author Monaghan, Scott
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Rights | Preview | Issue Date | Title | Author(s) | Type |
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openAccess | ![]() | 31-May-2011 | Fabrication of HfO2 patterns by laser interference nanolithography and selective dry etching for III-V CMOS application | Benedicto, Marcos ![]() ![]() ![]() ![]() | artículo |